Vortex oil-free vacuum pump history

Vortex oil-free vacuum pump features and applications Clean vacuum environment has always been the ideal vacuum environment scientists and business pursuits. Since the beginning to create a vacuum environment, people try to use different means to achieve the effect of cleaning the vacuum. Today, clean vacuum equipment has been developed to a variety of products such as condensate pump, column race pump, claw pump, scroll pump and diaphragm pump. Among the existing oil-free vacuum pumps, the vortex oil-free vacuum pump has the characteristics of stable operation, low noise, energy saving, light weight and small volume as compared with other types of oil-free vacuum pumps and has been widely applied to the following scientific research And the production areas: ① semiconductor industry - thin film preparation equipment, semiconductor device packaging equipment; ② vacuum metallurgy industry - vacuum furnace, nanomaterials preparation equipment, vacuum testing equipment; ③ Scientific Instruments Industry - Synchrotron radiation beam lines, electron microscopes, Analysis and testing equipment; ④ medical equipment - dental equipment, dialysis machines; ⑤ biological products industry - material purification, pharmaceutical preparation; ⑥ packaging industry - food, pharmaceuticals, biological products and other packaging equipment. Vortex oil-free vacuum pump working principle, technical indicators and compared with the ordinary pump Scroll oil-free vacuum pump scroll is one end connected to a plane with one or several involute spiral to form a scroll disc structure . A pair of scrolls consisting of a fixed scroll and an orbiting scroll form the basic suction mechanism for a scrollless oilless vacuum. For example, in a two-stage vortexless oil-free vacuum pump, there are two directions of a fixed scroll and a orbiting scroll between two scroll plates. Dynamic and fixed vortex scroll to form a relatively constant volume of crescent-shaped vacuum chamber so that gas suction from the suction port, the exhaust port discharge to complete the exhaust cycle.

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