Nanostructures on curved substrates have important applications in many fields, such as bionics, flexible electronics, and optics. The traditional nanoimprinting technology usually adopts a rigid template, which can achieve sub-10nm resolution, but the template can not be bent and can not be imprinted on the curved substrate to prepare nanostructures. The soft embossing technique using the elastic template can contact the curved surface in conformity with no external pressure to achieve the imprinting replication of the structure on the non-planar substrate, but due to the low Young's modulus of the elastic template, the imprinting structure The resolution and accuracy are limited.
Based on the current development of nanoimprinting, combined with traditional nanoimprint technology and soft embossing technology, the Institute of Optics and Technology of the Chinese Academy of Sciences has developed a sub-100nm resolution composite soft press based on UV-cured fluorenyl-ene materials. The method for preparing a template includes a rigid structural layer and an elastic base layer, as shown in FIG. 1 . First, a flexible film is prepared as an elastic base layer, and then a mercapto-ene prepolymer is spin-coated on a mother board having a surface structure, and an elastic film is imprinted on the mercapto-olefin layer to make uniform contact with the material. The thiol-ene material can be cured in the natural environment by a "click reaction" to form a cross-linked polymer that is not inhibited by oxygen and water. After the mother board is successfully separated, the elastic film and the cured fluorenyl-ene layer are tightly connected together to obtain a double-layered composite flexible template. Due to the good material properties, the rigid fluorenyl-ene structure layer can achieve higher resolution. Therefore, a high-resolution composite flexible template can be prepared by using this method, and can be used as a soft imprint template after surface anti-sticking treatment. In this study, a new method was used to prepare a sub-100 nm line grating composite soft stamping template with PDMS and PET as elastic substrates, as shown in FIG. 2 .
Related research results were published in the Journal of Nanoscience and Nanotechnology.
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